平面碳傳感器電導(dǎo)率計(jì)
HE-960LF/FS-09F-1/2平面碳傳感器電導(dǎo)率計(jì)有效保持恒定的研磨液稀釋度。保持適當(dāng)?shù)碾妼?dǎo)率值有助于保持晶圓拋光制程中的工藝穩(wěn)定性。即使是高粘度樣品液體（如 CMP 研磨液）也可以正常測量，因?yàn)槠涫褂玫膫鞲衅鹘Y(jié)構(gòu)降低了樣品液體附著在電極上的風(fēng)險(xiǎn)。同時(shí)，傳感器由具有良好耐化學(xué)性的接液材料制成，符合半導(dǎo)體制程的清潔度要求。此外，它還可以用于半導(dǎo)體制程開發(fā)階段的引入和特殊化學(xué)藥液的電導(dǎo)率控制。
高精度/高穩(wěn)定性
測量范圍：0 至 2,000 μS/cm, 0 至 10,000 μS/cm
重復(fù)性：± 0.5% F.S.，± 1.0% F.S.
無金屬污染
由于電極材料采用特殊碳制成，因此無需擔(dān)心金屬洗脫污染問題。
配備濃度換算功能
通過輸入化學(xué)藥液濃度和電導(dǎo)率之間的關(guān)系以及溫度特性，可實(shí)現(xiàn)兩種不同類型的濃度換算。
特別適用于低濃度化學(xué)品的稀釋控制。
節(jié)省空間
通過縮小傳統(tǒng)電導(dǎo)率傳感器的尺寸，提高了安裝布局的自由度。
安裝式例
HE-960LF/FS-09F-1/2平面碳傳感器電導(dǎo)率計(jì)規(guī)格
| Product name | Conductivity meter | |||
|---|---|---|---|---|
| Model | HE-960LF | |||
| Measurement method | Electrode type（2-electrode method） | |||
| Temperature specifications sensor | Platinum resistance 1000Ω/℃ | |||
| Measurement range | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm | 0.0 to 200.0μS/cm | ||
| 0.0 to 200.0μS/cm | 0 to 2000μS/cm | |||
| 0 to 1000μS/cm | 0 to 10000μS/cm | |||
| ＊Measuring range of raw conductivity Switched with setting change | ||||
| Temperature | 0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected. | |||
| Concentration conversion | Option 1,2 | 0 to 10.000% Conversion formula is defined by user (temperature compensation and concentration conversion) | ||
| Repeatability | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Linearity | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Transmission output | Number of output：4 DC4 to 20mA / 0 to 20mA input/output isolated type Maximum load resistance : 900Ω Transmission output range : Free setting within measuring range (Negative terminals of each transmission output channel are connected inside and thus have the same electrical potential.) | |||
| Contact output | Number of relay：5 ALARM contact R1,R2,R3 and R4 Contact type relay : Relay contact, SPST (1a） Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) Contact function Upper or lower ON/OFF alarm each measurement items. Contact action Closed when status is in the event. Opened when any erroneous status is normal or power is down. R1,R2 and R3 share a common terminal. Self diagnosis contact RF Contact type : relay contact , SPDT (1c) Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) C-NO contact action : Closed when status is normal. Opened when any erroneous status is detected or power is down. R4 and RF share a common terminal. | |||
| Contact input | Number of input：1 | |||
| Contact type：open collector. No-voltage contact | ||||
| Function : Hold command | ||||
| Communication output | RS-485 communication | |||
| Self-check | Sensor diagnosis (Short-circuit and disconnection of the temperature sensor). Converter error | |||
| Temperature compensation of conductivity | ● Arbitrary temperature coefficient entry (reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃） ● Arbitrary temperature compensation formula entry (reference temperature : 25℃, formula is defined by user) ● No temperature compensation is performed. | |||
| Temperature compensation range | 0 to 100℃ The temperature compensation under 0℃ and over 100℃ is expanded by a function | |||
| Ambient temperature | 5 to 45℃ | |||
| Relative humidity | －25 to 65℃ | |||
| Power supply | Rated voltage 24 V DC, 10W (max.) | |||
| Structure | Indoor-use panel installation type Panel case ： ABS, terminal : PBT Panel : IP65 dust and water proof structure | |||
| Conforming standards | CE Marking | EMC Directive : EN61326-2-3 | ||
| FCC Rule | FCC Part15 | |||
| Mass | Approx. 550g | |||
| External dimensions | 96 (W) × 96 (H) × 115 (D) mm Case depth : approx. 105mm (when panel-mounted） | |||
| Compatible sensors | FS-09F-1/2 | |||
上海默威生物科技有限公司一直專注于水質(zhì)分析儀、生物化學(xué)、生命科學(xué)儀器與環(huán)境監(jiān)測儀器的研發(fā)生產(chǎn)銷售等一體式服務(wù)公司。公司擁有自主“MOWEAL"品牌，主要生產(chǎn)產(chǎn)品覆蓋水質(zhì)分析儀、環(huán)境監(jiān)測儀、生命科學(xué)儀器等領(lǐng)域，能隨時(shí)為廣大用戶提供全程貼心服務(wù)，并能提供完善的產(chǎn)品組合和方案。公司主營產(chǎn)品：PH計(jì)/酸度計(jì)、電導(dǎo)率測定儀、溶解氧測定儀、化學(xué)需氧量COD/生化需氧量BOD快速測定儀、紫外可見分光光度計(jì)、噪音計(jì)、紫外線燈、紫外交聯(lián)儀、實(shí)驗(yàn)室分析儀器等等。
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